Available
Optical Microscopes
Zeiss AxioSkop
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Commercial Rate
The Optical microscope (Zeiss AxioSkop) in cleanroom (Class 100) can measure feature sizes below 1 micrometer. The following objective lenses are available: 5x, 10x, 20x, and 50x.
Capabilities
- ✓Instrument is also useful in making a qualitative assessment on when the chemical development process during lithography has been successfully completed. Surface contrast and roughness helps in making the determination.
- ✓Verifying undercut in a two-layer lithography process as part of metal layer patterning by a lift-off technique
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