
Microfabrication and Nanofabrication
Thermal Evaporator | Edwards 306 Vacuum Coater
By Edwards - 306 Vacuum Coater
Washington University in St. Louis
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The Edwards Auto 306 Vacuum coater deposits material in vacuum conditions by heating the source material. Films have low impurity due to high vacuum conditions. Growth rates are typically ~0.1 nm/s. Up to four materials can be deposited in-situ without breaking the vacuum. Users are expected to provide their own consumables, including boats and source materials.
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