PHI VersaProbe III AD Scanning XPS Microprobe

The core technology of the VersaProbe III AD is PHI’s patented, monochromatic, micro-focused, scanning x-ray source which provides excellent large area and superior micro-area spectroscopy performance. Features: Air protection vessel: enabling sample workflow from glovebox to XPS directly. Multi-point mode: automated high throughput scan on multiple positions/samples. Micro area approach: in situ x-ray imaging at high spatial resolution (<10 µm) for elemental and chemical state analysis, including mapping and line profile. Thin film profile analysis: using Ar ion, or C60 cluster gun with minimized chemical state damage. Angle resolved XPS (non-destructive): thickness and composition analysis of ultra-thin films. UPS: valence band structure and work function measurement using low energy UV source (He I: 21.2 eV and He II: 40.8 eV).