Fischione NanoClean Plasma Cleaner

The NanoClean is an RF Plasma sample cleaning tool that utilizes reactive gas compounds formed by the plasma to chemically reacting with the carbonaceous debris that exists on the sample surface. The gas mixture fed to the plasma contains 21% of oxygen and 79% of argon. The chamber is pumped by oil-free pumping system that is composed of a multistage diaphragm pump and a turbomolecular drag pump. The NanoClean can be used to remove surface carbonaceous contamination from both TEM and bulk samples, and the unit at IAC also comes with one vacuum pumping station that accommodates vacuum storage for up to 5 TEM holders.