Electron Microprobe (EPMA)
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Electron Microprobe (EPMA)

Thermo

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Electron Probe Microanalysis (EPMA) is an elemental analysis technique that uses a focused beam of high-energy electrons to non-destructively ionize a solid specimen surface, which induces the emission of x-rays that are characteristic to the elements present.

Capabilities

  • Quantitative elemental analysis of materials
  • Establishing bulk compositions at the micron to sub-micron scale
  • Geological studies: mineral analysis, igneous petrology, etc.
  • Metallurgical research and failure analysis
  • Thin film composition determinations
  • Semiconductor materials and ceramic analyses
  • Anthropological and art history investigations
  • 5 wavelength dispersive spectrometry (WDS) Bragg spectrometers, each equipped with 2-4 diffraction crystals
  • ThermoFisher Scientific System Six Silicon Drift Detector (SDD) for EDS
  • Capable of simultaneous WDS and EDS acquisitions
  • SE, BSE, and CL detectors