
Available
The Commonwealth Scientific Ion Milling & Thermal Evaporator System is a unique system which integrates the ion milling and thermal evaporator capabilities into one system. It enables Argon ion beam etching and thin film depositions to be performed in one system without needing to take out and expose your samples to the outside environment. Itβs equipped with an 8 cm Commonwealth Scientific broad beam (Kaufman) ion source which can generate an Ar ion beam current up to 100 mA. Please see this poster for detailed instrument properties and examples.
Capabilities
- βArgon ion milling, 8 cm Kaufman ion source
- βMaximum beam current: 100 mA
- βSystem pumps: Cryo pump and roughing pump
- βThermal evaporator number of source channels: 2
- βAllowed materials for film depositions: Au, Ag, Cu, Fe, Ti, Ni, Cr, Al, Pb, Sn, In. (*All source material should be pellets. Powders are strictly forbidden in this system.)
- βLocation 334 MRL
- βRelated Research Techniques Deposition ToolsDry Etching
- βRelated Research Cores Micro/Nano Fabrication and Cleanroom
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