Available
Tescan Mira 3 FEG SEM
Tescan Mira 3 FEG
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Commercial Rate
Specifications
| Resolution | 1.2 nm at 30 kV; 2.3 nm at 3 kV. |
| Stage | X,Y = 80,60 mm, Z = 47 mm; 54 mm clearance with rotation stage / 81 mm without, T = - 80° to + 80°, R = 360° continuous, Repeatability: <1 μm (x and y), Tilt-eucentric at 10 mm mounting height for all working distances, X and Y movements are in the tilt plane |
| Detectors | SE Everhart Thornley Detector, Scintillator Backscatter Detector, Scanning Transmission Electron Microscopy (STEM) Detector, Oxford X-ACT EDS Detector |
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