E-Beam Evaporator
CHA 6 Pocket System (2025)
Training Time = 1.5hrs. Requires a 1.5hr minimum Self Reservation. CHA 6 Pocket Electron Beam Evaporator that also has a thermal source. This system is capable of 'Co-Deposition' i.e. the capability to co-deposit two materials simultaneously using two separate evaporation sources. Each evaporation source has its own thickness monitor for independent rate control. 4" and 6" capable. Advanced notice required for planetary fixture requirement. Planetary fixture pumpdown time is longer, so please plan accordingly. Available materials: Chrome, Titanium, Nickel, Tantalum, Silver, Gold, Germanium, Cobalt, Tin, Silicon, Silicon Dioxide, Palladium, Titanium Dioxide, Hafnium Oxide, Platinum, Aluminum, Aluminum Oxide, Copper. There may be additional charges for using precious metals such as Gold and Platinum. All crucible and planetary changes are performed by Nano Fabrication Staff only.
Capabilities
- ✓Electron beam evaporation
- ✓Thermal evaporation
- ✓Co-deposition capability
- ✓Dual source operation
- ✓Independent rate control
- ✓4" and 6" substrate capability
- ✓Multiple material options
- ✓Thickness monitoring
Specifications
| manufacturer | CHA |
| model | 6 Pocket System |
| sources | Electron beam + thermal |
| substrate sizes | 4" and 6" |
| training time | 1.5 hours |
| min reservation | 1.5 hours |
| materials | Chrome, Titanium, Nickel, Tantalum, Silver, Gold, Germanium, Cobalt, Tin, Silicon, SiO2, Palladium, TiO2, HfO2, Platinum, Aluminum, Al2O3, Copper |
| notes | Precious metals additional charges, Staff-only crucible changes |
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