Kratos Supra+ XPS

Capabilities

• ✓Hemispherical and spherical mirror energy analyzers.
• ✓High-sensitivity Delay Line Detector (DLD).
• ✓Automated dual anode Al Ka/Ag La (1486.7/2984.2 eV) monochromatic X-ray source.
• ✓Maximum sample size: maximum lateral dimension  34 mm x 75 mm, maximum thickness 7mm .
• ✓Large area mode (700 x 300 um2) and small spot mode (110 um, 55 um, 27 um, and 15 um diameters) spectroscopy.
• ✓Imaging XPS (800 x 800 um2, 400 x 400 um2 and 200 x 200 um2 fields-of-view) with spatial resolution down to 1 um.
• ✓XPS image-stitching mode (up t0 10 x 10 mm2)
• ✓Load-lock camera and high magnification analysis chamber microscope.
• ✓Angle resolved XPS analysis.
• ✓Ar+/Arn+ gas cluster ion source (GCIB) as follows: Ar+at 50 kV, and options of Ar500+ , Ar1000+ , Ar2000+ or Ar3000+ at 5, 10, 15 or 20 KV.
• ✓Analysis chamber heating and cooling (-100°C to +800°C).
• ✓3-gas dosing system.
• ✓Inert gas or vacuum sample transfer vessel.
• ✓Location B08 MRL
• ✓Related Research Techniques X-Ray Photoelectron Spectroscopy