Reactor Vacuum Furnace (RVF)

Capabilities

• ✓Maximum temperature: 1000 oC (with quartz tube) and 1200 oC (with alumina tube)
• ✓Vacuum down to below 100m Torr, higher with gas flow
• ✓With 1-inch outer diameter quartz tube the maximum temperature is 1000 oC
• ✓With 1-inch outer diameter ceramic tube the maximum temperature is 1200 oC
• ✓2 Mass Flow Controllers: 0-1SLM Argon 0-1SLM Hydrogen or Methane or Ethylene or Oxygen
• ✓0-1SLM Argon
• ✓0-1SLM Hydrogen or Methane or Ethylene or Oxygen
• ✓Data acquisition system
• ✓Downstream Pressure Regulation,  0.1 to 500 Torr
• ✓Four Thermocouples which can be moved to custom locations
• ✓Five capacitance manometers: Upstream absolute 1000 Torr Downstream absolute 1000 Torr Differential 1000 Torr Differential 100 Torr Differential 10 Torr
• ✓Upstream absolute 1000 Torr
• ✓Downstream absolute 1000 Torr
• ✓Differential 1000 Torr
• ✓Differential 100 Torr