Zeiss Crossbeam350 FIB-SEM

Standard Focused Ion Beam (FIB) milling Standard SEM imaging with Energy Dispersive X-ray (EDX) analysis Cryo-FIB & Cryo-SEM 3D FIB-SEM & 3D CryoFIB-SEM for tomography TEM lamella preparation SEM&EDX: Academic users $66/h, Industry users $120/h FIB&FIB-SEM: Academic users: $75/h, Industry users: $150/h, After-hour usage fee: please ask BIF staff CryoSEM: Academic users $550/day, Industry users $960/day CryoFIB: Academic users $625/day, Industry users $1200/day – Electron optics: Schottky field emission source Acceleration voltage: 0.05 – 30 kV, Probe current: 1 pA – 100 nA, In-column beam deceleration system, Maximum 0.6 nm resolution at 15kV, 1 nm resolution at 1 kV, 1.6 nm resolution at 0.2 kV – Ion Optics: Gallium FIB source Ion beam energy: 0.5 – 30 kV, Probe current: 1 pA – 100 nA, Resolution: 120 nm at 1kV, 50 nm at 5 kV – In-lens detectors for high-resolution imaging with short working distances to detect SEs and BSEs – In-column detectors to detect SEs and BSEs – SmartSEM, SmartFIB, Atlas5 software operated by Windows 10