Available
Oxford RIE A - BCL3, Cl2, SF6, AR
Oxford Plasmalab 80+ (2025)
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Commercial Rate
Oxford Plasmalab 80+ Reactive Ion Etcher. Daily user entrance fee required. Please book in increments of 30min. Available gases: Cl2, Bcl3, SF6, Ar. Training is required before use.
Capabilities
- ✓Reactive ion etching
- ✓Chlorine etching
- ✓BCl3 etching
- ✓SF6 etching
- ✓Argon processing
