Rapid Thermal Annealing furnace (Custom) – max temperature 1000°C

Capabilities

• ✓Maximum temperature: 1000 oC.
• ✓Tube type and size: quartz tube, 2-inch inner diameter.
• ✓Gas: Nitrogen, Argon, or Oxygen. 0-10 SLPM.
• ✓Location 328 MRL
• ✓Related Research Techniques Diffusion / Annealing FurnacesFurnace Equipment
• ✓Related Research Cores Micro/Nano Fabrication and Cleanroom