Rapid Thermal Annealing furnace (Custom) – max temperature 1000°C
Available

Rapid Thermal Annealing furnace (Custom) – max temperature 1000°C

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Commercial Rate

Capabilities

  • ✓Maximum temperature: 1000 oC.
  • ✓Tube type and size: quartz tube, 2-inch inner diameter.
  • ✓Gas: Nitrogen, Argon, or Oxygen. 0-10 SLPM.
  • ✓Location 328 MRL
  • ✓Related Research Techniques Diffusion / Annealing FurnacesFurnace Equipment
  • ✓Related Research Cores Micro/Nano Fabrication and Cleanroom
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