Oriel Re-Exposure Unit
Available

Oriel Re-Exposure Unit

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Commercial Rate

A 365nm wavelength light source dedicated for re-exposing photoresist. Simple to operate by turning the shutter on and off.

Capabilities

  • ✓Location 387 MRL
  • ✓Related Research Techniques Lithography
  • ✓Related Research Cores Micro/Nano Fabrication and Cleanroom
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