Available
The Hydrogen Vacuum Furnace is dedicated to annealing of materials under hydrogen and vacuum environment. Do not carry out graphene growth in this furnace. Ultra-high purity hydrogen (H2) and Argon (Ar) are available for annealing of materials at temperatures up to 1000 Celsius. H2 flows can be controlled in the range of 0-100 sccm. The Ar flow can be controlled in a range of 0-1000 sccm. It is equipped with an oil-free pump to provide an oil-free environment for annealing processes. No powdery samples are allowed in this furnace. Users must discuss with staff for sample compatibility.
Capabilities
- ✓Maximum temperature: 1000 Celsius
- ✓Multi ramping and soaking controls available
- ✓Tube type and size: Quartz Tube, 3 inch outside diameter
- ✓Available gases: Argon (Ar), Hydrogen (H2). All ultra-high purity
- ✓Location 322 MRL
- ✓Related Research Techniques Diffusion / Annealing FurnacesFurnace Equipment
- ✓Related Research Cores Micro/Nano Fabrication and Cleanroom
