Available
Oxford RIE B - Inert Gases
Oxford Plasmalab 80 (2025)
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Commercial Rate
Oxford Plasmalab 80 with inert gases. Daily user entrance fee required. Available gases: Ar, O2, CF4. Training is required before use.
Capabilities
- ✓Reactive ion etching
- ✓Inert gas processing
- ✓Oxygen plasma
- ✓CF4 etching
