Oxford RIE B - Inert Gases
Available

Oxford RIE B - Inert Gases

Oxford Plasmalab 80 (2025)

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Commercial Rate

Oxford Plasmalab 80 with inert gases. Daily user entrance fee required. Available gases: Ar, O2, CF4. Training is required before use.

Capabilities

  • Reactive ion etching
  • Inert gas processing
  • Oxygen plasma
  • CF4 etching

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