Hitachi SU8700 SEM

Standard FESEM &Variable Pressure (VP)-SEM, EDX: Academic users: $66/h, Industry users: $120/h Electron Source: Schottky field emission gun Accelerating Voltage: 0.1 – 30 KV Maximum 0.6 nm resolution at 15 kV, 3.0 mm Working Distance (WD)/ Maximum 0.8 nm resolution at 1 kV, 1.5 mm WD Inchamber detectors: LD (SE+BSE) and PD-BSE (BSE) detectors Oxford Energy Dispersive X-ray Microanalysis system: AZtecLive Advanced Microanalysis System with UltimMax Infinity 100 Analytical Silicon Drift Detector