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Scanning Electron Microscope
JEOL JSM 6390 (2025)
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Sample Characterization Equipment. Location: Olney OG-2. Training Estimate: 4 hours. Conventional tungsten thermionic emission gun; 3.0 nm resolution at 30 kV accelerating voltage; 0.5 – 30 kV accelerating voltage range; 5x – 300,000x magnification range. One chamber-mounted Everhart-Thornley type secondary electron detector for both SE and BE imaging. Large specimen chamber accommodating up to 6 inch diameter wafers, eucentric goniometer stage with manual X-, Y-, Z-, R- and Tilt- axes. Automated features: Auto Focus/Auto Stigmation; Auto Contrast and Brightness; Auto gun saturation, bias and alignment. Include Sample Description and Analysis Requirements in note section of Order Form.
Capabilities
- ✓Conventional tungsten SEM
- ✓3.0 nm resolution
- ✓Large sample accommodation
- ✓6 inch wafer capability
- ✓Automated functions
- ✓Auto focus/stigmation
- ✓Auto contrast/brightness
- ✓Manual stage control
Specifications
| manufacturer | JEOL |
| model | JSM 6390 |
| emission source | Tungsten thermionic |
| resolution | 3.0 nm at 30 kV |
| magnification | 5x – 300,000x |
| voltage range | 0.5 – 30 kV |
| sample size | Up to 6 inch diameter |
| detector | Everhart-Thornley SE/BSE |
| training time | 4 hours |
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