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AJA ATC-M Series Multi-Technique System
AJA International ATC-M Series (2025)
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AJA International ATC-M Series Multi-Technique Systems are versatile tools that combine various thin film deposition, ion milling and analytical operations in a single chamber (Hybrid Systems) or in multiple chambers (Multi-Chamber Systems) to allow the in-situ transfer of substrates from process to process without breaking vacuum.
Capabilities
- ✓Multiple thin film deposition techniques
- ✓Ion milling
- ✓Analytical operations
- ✓Single chamber hybrid systems
- ✓Multi-chamber systems
- ✓In-situ substrate transfer
- ✓Vacuum maintained between processes
- ✓Versatile processing platform
- ✓Multiple process combinations
Specifications
| model | ATC-M Series |
| techniques | Deposition, ion milling, analytical |
| configuration | Single or multi-chamber |
| transfer | In-situ without vacuum break |
Similar Instruments
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Available
Commercial Rate
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