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The Harrick Plasma PDC-32G Cleaner is low-cost bench-topinductively coupled plasma device. It may be employed in a broad range of surface engineering applications, including nanoscale surface cleaning, surface preparation and surface modification/treatment. Manufacturer's website: http://harrickplasma.com/products/basic-plasma-cleaner
Capabilities
- ✓Three adjustable RF power settings: 6.8 W (low), 10.5 W (medium) and 18 W (high)
- ✓RF frequency: MHz range
- ✓Process gas: O2
- ✓3” diameter x 6.5” length Pyrex glass chamber
- ✓Location 342 MRL
- ✓Related Research Techniques Dry Etching
- ✓Related Research Cores Micro/Nano Fabrication and Cleanroom
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