MJB3 Mask Aligner

The Karl Suss MJB_3 is a contact aligner used to expose the photoresist on samples from small pieces of 1 cm2 to substrates of 3-inch diameter or square and 300um-1mm in thickness. Masks up to 3 inches square. The resolution depends on contact mode, optics, exposure wavelength and "operator technique". Alignment is performed manually by manipulating micrometers while observing the sample and mask with a microscope. There are two MJB_3 instruments in MRL 388 of the MRL MicroFab cleanroom (Fig.1). Both of them are configured for top side alignment. They are equipped with a 350W mercury lamp. They are configured for the near-UV window (365nm, i-line). The microscope of the MJB_3 #1 is equipped with 5x, 10x and 20x objectives. The microscope of the MJB_3 #2 is equipped with 5x, 10x, 20x and 25x objectives. Exposure resolution of a few micrometers (>2 microns) are reliably achievable with these tools.