The Nikon Altera 7.5.5 allows high precision characterization of device geometry in critical to function locations. Using a 5-axis measuring system and a number of probe options, the system measures with volumetric accuracy on the order of 1.8 microns, allowing a designer to confirm part dimensions to tight tolerances.

Capabilities

✓High precision geometry characterization
✓Critical dimension measurement
✓5-axis measuring system
✓Multiple probe options
✓Volumetric accuracy measurement
✓Tight tolerance verification
✓Part dimension confirmation
✓Precision metrology

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Specifications

model	Altera 7.5.5
axes	5-axis system
accuracy	1.8 microns volumetric
probes	Multiple probe options