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SUSS MicroTec MA6 Mask Aligner
SUSS MicroTec MA6 (2025)
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A UV mask aligner and exposure system with split screen stereo camera alignment system capable of both front and back side alignment of from 2" to 6" diameter substrates.
Capabilities
- ✓UV mask alignment
- ✓Front side alignment
- ✓Back side alignment
- ✓Multiple substrate sizes
- ✓Stereo camera system
- ✓Precision alignment
Specifications
| model | MA6 |
| substrate size | 2" to 6" diameter |
| alignment | Front and back side |
| camera | Split screen stereo |
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$120.00/hr
University of Massachusetts Amherst
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