Available
MRL provides the following acids for cleanroom users. This fume hood includes DI water, nitrogen gun and hot plate. NOTE: a separate safety training must be completed before using this fume hood.
Capabilities
- ✓Hydrochloric Acid (HCl)Hydrofluoric Acid (HF)
- ✓Buffered Oxide Etch (BOE)
- ✓Nano-strip (replacment for piranha)
- ✓Nitric Acid (HNO3)
- ✓Phosphoric Acid (HP3O4)
- ✓Etching of SiO2in BOE or HF
- ✓Etching of Si3N4in HP3O4
- ✓Thin film etching of TiO2, Al2O3and HFO2in HF mixture
- ✓Etching of AL in HNO3and HP3O4 mixture
- ✓Etching in Ni in HNO3
- ✓Location 359 MRL
- ✓Related Research Techniques Wet Processing
- ✓Related Research Cores Micro/Nano Fabrication and Cleanroom
