Available
Capabilities
- ✓Maximum temperature: 1100 oC with 3 temperature zones.
- ✓Tube type and size: quartz tube, 6-inch outer diameter.
- ✓Gas: Nitrogen, Argon, or Oxygen. 0-10 SLPM.
- ✓Location 328 MRL
- ✓Related Research Techniques Diffusion / Annealing FurnacesFurnace Equipment
- ✓Related Research Cores Micro/Nano Fabrication and Cleanroom
