High Temperature CM furnace – max temperature 1600°C to 1700°C

Capabilities

• ✓Maximum temperature: 1600 oC to 1700°C depending on run times.
• ✓Tube type and size: ceramic tube, 2-inch outer diameter.
• ✓Gas: Nitrogen, Argon, or Oxygen. 0-10 SLPM.
• ✓Location 328 MRL
• ✓Related Research Techniques Diffusion / Annealing FurnacesFurnace Equipment
• ✓Related Research Cores Micro/Nano Fabrication and Cleanroom