The AURIGA™ 60 Crossbeam™ FIB-SEM provides high resolution solutions for nano-tomography, 3-D imaging and analysis, lamellar and thin foil preparation, and nano-patterning. In conjunction with an Axio Imager M2 light microscope, a “Shuttle & Find” correlative microscopy scheme allows the visible light contrasts and information about feature color, size, and morphology obtained by the light microscope to be combined with advanced analytical methods of the AURIGA™ 60 electron and ion optics for the discovery of new structural and elemental information. Additionally, the view-and-slicing capability of the FIB-SEM extends the opportunities to correlative tomography. The high resolution FIB optics of AURIGA™ 60, together with its high precision stage, also enables nano-scale patterning or fiducial mark preparation, which can further facilitate other correlative analyses, such as those offered by vibrational spectroscopy.
