Available
OAI 1000 Watt DUV Exposure System
OAI 1000 Watt DUV (2025)
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Commercial Rate
The OAI 1000 Watt DUV Exposure System is capable of exposing substrates up to 150 mm diameter to a 1000W ~250nm wavelength deep ultra-violet light source. Samples are placed in the exposure chamber and the time of exposure can be varied - the power setting is always 1000W.
Capabilities
- ✓Deep UV exposure
- ✓Large substrate capability
- ✓High power exposure
- ✓Variable exposure time
- ✓Photoresist processing
Specifications
| model | 1000 Watt DUV |
| power | 1000W |
| wavelength | ~250nm |
| substrate size | Up to 150mm |
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available
$120.00/hr
University of Massachusetts Amherst
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