OAI 1000 Watt DUV Exposure System
Available

OAI 1000 Watt DUV Exposure System

OAI 1000 Watt DUV (2025)

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Commercial Rate

The OAI 1000 Watt DUV Exposure System is capable of exposing substrates up to 150 mm diameter to a 1000W ~250nm wavelength deep ultra-violet light source. Samples are placed in the exposure chamber and the time of exposure can be varied - the power setting is always 1000W.

Capabilities

  • Deep UV exposure
  • Large substrate capability
  • High power exposure
  • Variable exposure time
  • Photoresist processing

Specifications

model1000 Watt DUV
power1000W
wavelength~250nm
substrate sizeUp to 150mm

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