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March Instruments PM-600 Plasma Treatment System
March Instruments PM-600 (2025)
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The PM-600 is a large barrel benchtop plasma system with a 13.56 MHz RF generator having an output power of up to 600W for stripping photoresist, cleaning substrates, and mild etching. It has a 10 in. diameter by 12 in. long quartz chamber with an 8 inch by 8 inch flat quartz glass substrate rack.
Capabilities
- ✓Photoresist stripping
- ✓Substrate cleaning
- ✓Mild etching
- ✓Large chamber capacity
- ✓High power processing
- ✓Automated sequencing
Specifications
| model | PM-600 |
| power | Up to 600W |
| frequency | 13.56 MHz |
| chamber | 10" diameter x 12" long |
