Available
Film Stress Measurement System
Toho Flexus (2025)
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Commercial Rate
Note: all equipment is reserved in increments of 30min. The Clean Room Entrance Fee is required in addition to the hourly rate. Please book both the tool and the 'Clean Room Entrance'. System for measuring film stress through substrate curvature analysis.
Capabilities
- ✓Film stress measurement
- ✓Mechanical property analysis
- ✓Substrate curvature measurement
- ✓Thin film characterization
- ✓Stress analysis
- ✓Clean room operation
- ✓30 minute increments
- ✓Precision measurement
Specifications
| manufacturer | Toho |
| model | Flexus |
| measurement | Film stress |
| reservation | 30 minute increments |
| additional fee | Clean Room Entrance Fee required |