
surface analysis
KLA Tencor Alpha D-500 Stylus Profiler
By KLA Tencor - Alpha D-500 (2025)
University of Massachusetts Amherst
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The Alpha D-500 stylus profiler allows high resolution characterization of 2D surfaces. The measurements can be used to ascertain step height, roughness, bow, and shape of a piece, as well as measurement of stress. The device also allows high resolution visualization of surface features. Such measures are used in a variety of fields, including materials research and medical devices.
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