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metrology

Gaertner L116C Ellipsometer

By Gaertner - L116C (2025)

University of Massachusetts Amherst
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The Gaertner L116C Ellipsometer offers noncontact measurement of transparent and translucent films using a 632.2 nm wavelength HeNe laser. The rotating analyzer samples 144 data points and can measure films of thickness from 0 to 60000 Ã… with an accuracy of +/-3 Ã… and a repeatability of +/-1 Ã… over most of the measurement range.

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